Invention Reference Number
In order to avoid the limitations and costs due to the use of monolithic components for chemical vapor deposition, we developed a modular system in which the reaction chamber can be composed of a top and bottom cone, nozzle, and in-situ reaction chambers. These components could be fabricated with plastics, ceramics, and metals by traditional or additive manufacturing processes. In this new design, the nozzle and the bottom cone are fabricated as individual pieces to allow an easy exchange. Furthermore, since it is desirable to produce chemical precursors as close as possible to the entrance of the reaction chamber, we designed a parallel small reaction chamber where solid precursors could be produced.
Contact
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